Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS:NH3 (i.e. 16:1), usually results in lower stress nitride films. Wikipedia
|Emergency Response Guide No. 119|
Data from the Hazardous Materials TableSource: 49 CFR §172 (2018/07)
(3) Hazard Class2.3
(5) Packing Group
Special provisions may be very complex. The extracts are taken from 49 CFR §172.102. Please be careful with the information, as necessary, additional conditions may be applied that are not written here. Please check the original source and report bugs.
(9) Quantity Limits
(10) Vessel stowage
Segregation Chart for Load, Transport, Storage
In this table a statement is contained for each hazard class whether the loading, transport or storage with other hazard classes is allowed, is not permitted or is restricted. The table is based on U.S.-Code 49 CFR §177.848.
|May not be loaded, transported, or stored together in the same transport vehicle or storage facility.|
|Load, transport, storage together is not restricted.|
|Load, transport, storage together is allowed under restrictions.|