HazMat Tool — substance information
Trichlorosilane
HMT May 2026Trichlorosilane
Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Wikipedia
Substance Data
Source: PubChem (HSDB, 19.11.2019)CAS-Number10025-78-2 |
Flash Pointn/a | Boiling Pointn/a |
| Emergency Response Guide No. 139 |
Hazardous Materials Table
Source: 49 CFR §172 (2026/05)(3) Hazard Class4.3Dangerous when wet materials |
(4) Identification number |
(5) Packing Group |
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(6) Labels |
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(7) Special Provisions (§172.102)
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| N34 | |
|---|---|
| T14 | |
| TP2 | |
| TP7 | |
| TP13 | |
| W31 |
(8) Packing Authorizations (§173.***) 
| (8A) Exceptions | None | |
|---|---|---|
| (8B) Non-bulk | 201 | see 49 CFR §173.201 |
| (8C) Bulk | 244 | see 49 CFR §173.244 |
(9) Quantity Limits 
| (9A) Passenger aircraft/rail | Forbidden |
|---|---|
| (9B) Cargo aircraft only | Forbidden |
(10) Vessel stowage 
| (10A) Location | |
|---|---|
| (10B) Other |
Segregation chart for load, transport, and storage
This chart shows whether loading, transport, or storage with other hazard classes is permitted, prohibited, or restricted. Based on 49 CFR §177.848.
| Hazard class | 8![]() | 7![]() | 6.1![]() | 5.2![]() | 5.1![]() | 4.3![]() | 4.2![]() | 4.1![]() | 3![]() | 2.3B![]() | 2.3A![]() | 2.2![]() | 2.1![]() | 1.6![]() | 1.5![]() | 1.4![]() | 1.3![]() | 1.1/1.2![]() |
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1.6 ![]() | ||||||||||||||||||
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2.3A ![]() | ||||||||||||||||||
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3 ![]() | ||||||||||||||||||
4.1 ![]() | ||||||||||||||||||
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5.1 ![]() | ||||||||||||||||||
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6.1 ![]() | ||||||||||||||||||
7 ![]() | ||||||||||||||||||
8 ![]() |
| Must not be loaded, transported, or stored together in the same vehicle or facility. | |
| May be loaded, transported, or stored together. | |
| May be loaded, transported, or stored together only with restrictions. |

